发明名称 Nitride semiconductor based light-emitting device and manufacturing method thereof
摘要 An object of the present invention is to provide a nitride semiconductor based light-emitting device, which is low in operating voltage reduction and is high in performance, and a manufacturing method thereof. A first metal film is formed on a P-type conductive nitride semiconductor formed on a substrate, and then, a film (WO<SUB>X</SUB>) made of tungsten oxide is formed in superimposition, followed by annealing.
申请公布号 US2007224715(A1) 申请公布日期 2007.09.27
申请号 US20060492924 申请日期 2006.07.26
申请人 TERANO AKIHISA;TANAKA SHIGEHISA 发明人 TERANO AKIHISA;TANAKA SHIGEHISA
分类号 H01L21/00;H01L33/32;H01L33/40 主分类号 H01L21/00
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