| 摘要 |
A vibrator 10 , which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at a central portion 11 and extending in the radial direction while mutually keeping the same angle and has a ring portion 13 connected to the eight beam portions 12 . Outside the ring portion 13 , eight electrodes 21 a to 21 h for electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap 22 created between the ring portion 13 and the electrodes 21 a to 21 h. Inside the ring portion 13 , sixteen electrodes 23 for frequency adjustment are spaced uniformly with a gap 24 created between the ring portion 13 and the electrodes 23.
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