| 摘要 |
An electrostatic chuck includes: a base body formed of an aluminum nitride sintered body containing samarium; and an electrode embedded in the base body and containing molybdenum, wherein a portion of the base body from the electrode to a base body surface is formed into a dielectric layer, and the base body surface is formed into a substrate mounting surface on which a processing target is sucked and mounted, and a content of samarium-aluminum oxide phases in the base body in a vicinity of the electrode is set at 2.5% or less in terms of an area ratio.
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