发明名称 Electric Device With Vertical Component
摘要 A method of providing an electric device with a vertical component and the device itself are disclosed. The electric device may be a transistor device, such as a FET device, with a vertical channel, such as a gate around transistor, or double-gate transistor First an elongate structure, such as a nanowire is provided to a substrate. Subsequently, a first conductive layer separated from the substrate and from the elongate structure by a dielectric layer is provided. Further, a second conductive layer being separated from the first conductive layer by a separation layer is being provided in contact with at least a top section of the elongate structure.
申请公布号 US2007222074(A1) 申请公布日期 2007.09.27
申请号 US20050569175 申请日期 2005.05.19
申请人 KONINKLIJKE PHILIPS ELECTRONICS, N.V. 发明人 BAKKERS ERIK PETRUS A.M.;WOLTERS ROBERTUS A.M.;KLOOTWIJK JOHAN H.
分类号 H01L23/52;H01L21/3205;H01L21/336;H01L27/12;H01L29/786 主分类号 H01L23/52
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