FORMING METHOD FOR PATTERN AND MANUFACTURING METHOD FOR MOLD

摘要

PROBLEM TO BE SOLVED: To provide a method for accurately forming a desired pattern and a manufacturing method for mold therewith. SOLUTION: The forming method for pattern with a flexible substrate includes the following steps: detecting a mark position for displacement detection provided on the substrate; forming a pattern on the substrate surface; and expanding or shrinking the substrate having the pattern. COPYRIGHT: (C)2007,JPO&INPIT