PIEZORESISTIVE CANTILEVER BASED NANOFLOW AND VISCOSITY SENSOR FOR MICROCHANNELS

摘要

This invention provides a sensor to measure physical and/or chemical properties of viscous fluids. The sensor is based on microfabricated piezoresistive cantilevers. Deflection of these cantilevers is read out using, e.g., a wheatstone bridge to amplify and convert the deflection into a voltage output. The cantilevers and/or tips attached thereto, can be chemically or physically modified using reagents specific to interact with analytes to be detected in the fluid. The cantilevers can be integrated in a microfluidic system for easy fluid handling and the ability to manage small quantities of fluids.