发明名称 CANTILEVER AND METHOD FOR MANUFACTURING SAME
摘要 <P>PROBLEM TO BE SOLVED: To enable a probe section to be attached using no adhesive for a short time without any effort, enable even a minute probe section to be attached which is difficult to be observed by an optical microscope, and enable a modification to be carried out without being restricted by any material in order to improve the degree of freedom in design. <P>SOLUTION: A cantilever 1 is equipped with: a lever section 2 with spring characteristics which extends from the proximal end side to the distal end side along one direction and has a plane opposite to a sample; a holder section 3 for supporting the proximal end side of the lever section; the probe section 4 which can contact with the sample under the state of being disposed at the distal end of the lever section and has an opposing surface 4a being opposite to at least the sample side and being made up in a spherical form having a predetermined radius; and a holding section 5 for holding the probe section in such the state that the opposing surface is exposed. The holding section has a contact surface in its inner surface for contacting with the outer surface of the probe section in such the state that the holding section is arranged on a position surrounding the perimeter of the probe section, and the probe section is held by a chemical bonding force interacting directly between the contact surface and the outer surface. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007248289(A) 申请公布日期 2007.09.27
申请号 JP20060072673 申请日期 2006.03.16
申请人 SEIKO INSTRUMENTS INC 发明人 SHIGENO MASAJI;MATSUZAWA OSAMU;WATANABE NAOYA;NIHEI AMIKO;INOUE AKIRA;SHIRAKAWABE YOSHIHARU;MURAMATSU HIROSHI;YAMAMOTO YUJI
分类号 G01Q60/38;G01Q70/00 主分类号 G01Q60/38
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