| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pad conditioning disc which more surely eliminates foreign matters on a polishing pad. <P>SOLUTION: A plurality of brushes 12 are formed in each brush part. Diamond or ceramic dressing teeth 11, for instance, are formed in the same way as a dressing part around the brushes 12. The height of each of the dressing teeth 11 is about 1 mm, for instance. The width of each of the brush parts 12 is about 1 mm, for instance. The length of each of brush bristles constituting the brushes 12 becomes shorter from a center toward the outside. The length of each the brush bristles becomes ≤2 mm, for instance, at the center of the brushes 12. An angle at a distal end of each of the brushes 12 formed by difference of the lengths of the brush bristles is made ≤30°, for instance. The brush bristles are made of nylon, for instance, and the thickness is about 0.01 mm to 1 mm, for instance. <P>COPYRIGHT: (C)2007,JPO&INPIT |
