FIELD EMISSION ELECTRON SOURCE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a field emission electron source device in which effect of gas and ion in the field emission electron source device on the field emission electron source array is eliminated or reduced and which has a high reliability. SOLUTION: The field emission electron source device is provided with a vacuum container housing a field emission electron source array 10, a target 3, and an auxiliary electrode 8 and a getter pump 80 which is arranged in a vacuum container and absorbs and removes surplus gas. The electron beams emitted from the field emission electron source array 10 pass through a plurality of through holes formed in the auxiliary electrode 8 and reach the target 3. The space 52 including the field emission electron source array 10 and the space 51 including the target 3 and the getter pump 80 are divided substantially by the auxiliary electrode 8 so that the gas generated from the target 3 may not pass through the space including the field emission electron source array 10 and may be absorbed by the getter pump 80. COPYRIGHT: (C)2007,JPO&INPIT