| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam irradiation apparatus, capable of making an irradiation position of a laser beam smoothly follow a target track, while prolonging the service life of a semiconductor laser and reducing electric power consumption. SOLUTION: A scanning laser 100 and a servo laser 500 are different in wavelengths of the emitted laser beams. The laser beam from the servo laser (servo laser beam) is transmitted through a scanning lens 301, then is reflected by a dichroic mirror 400, and converges on a PSD 700. The convergence position of the servo laser beam, detected by the PSD 700, corresponds to the scanning position of the laser beam from the scanning laser beam 100 (scanning laser beam) by one-to-one. Thus, the scanning position of the scanning laser beam can be drawn in the target track, on the basis of the detection signal from the PSD 700. The service life of the scanning laser 100 is prolonged by pulse light emission of scanning laser beam only at the target position so that the electric power consumption of the beam irradiation apparatus as a whole can be reduced. COPYRIGHT: (C)2007,JPO&INPIT
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