| 摘要 |
PROBLEM TO BE SOLVED: To prevent occurrence of voltage out of a set value such as overcurrent, in a semiconductor inspecting device where a bypass capacitor is connected between the ground and a supply power voltage line coupling a terminal connected to the inspecting device to a terminal connected to a device. SOLUTION: The semiconductor inspecting device has a device 21 for monitoring the potential difference between a connection origin and a connection destination of a relay 11. The semiconductor inspecting device has a controller for connecting the relay 12 connected to the device to the ground when there is the potential difference between the connection origin and connection destination of the relay 11 and a signal for connecting the relay 11 from the inspecting device. When the potential difference runs out in a voltage monitoring device 21, the relay 12 returns. Thus, connection control of the bypass capacitor can be performed without care by a program for inspection, and an inspection board is protected from the voltage out of the set value such as overcurrent. COPYRIGHT: (C)2007,JPO&INPIT
|
