| 摘要 |
A magnetic sensor element of a flux gate type comprising a magnetism sensitive part ( 8 a) formed by winding a coil ( 3 ) around a magnetic core layer ( 8 ), and magnetism collective part ( 8 b) for guiding magnetic fluxes to the magnetism sensitive part ( 8 a). Respective central parts of the magnetism collective part ( 8 b) are connected with the respective ends of the magnetism sensitive part ( 8 a). Therefor the magnetic core layer ( 8 ) is formed so as to resemble a letter H in planar shape. And the coil ( 3 ) of the magnetism collective part ( 8 b) is a thin-film coil comprising a plurality of upper coil thin-films ( 12 ) and a plurality of lower coil thin-films ( 4 ) formed on an upper surface and a lower surface of the magnetic core layer ( 8 ) via insulation layers by connecting together the respective lower coil thin-films ( 4 ) and the upper coil thin-films ( 12 ), at respective adjacent ends thereof, so as to be sequentially continuous with each other.
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