| 摘要 |
A method for manufacturing an inkjet head having a pressure chamber that stores ink, a nozzle that is provided at the pressure chamber and ejects the ink, and an actuator that changes an internal pressure of the pressure chamber to eject the ink in the pressure chamber through the nozzle is provided. The method includes the steps of: laminating a first separation film and a second separation film on a substrate; forming the actuator on the second separation film by using one of a liquid phase method and a vapor phase method to manufacture an upper structure; exposing an interface between the first separation film and the second separation film; contacting a separation liquid with the interface between the first separation film and the second separation film to separate the first separation film from the second separation film at the interface, thereby separating the upper structure from the substrate; forming a lower structure having the pressure chamber, independently of the substrate; and joining the upper structure and the lower structure together.
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