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发明名称
摘要
申请公布号	JP3980136(B2)	申请公布日期	2007.09.26
申请号	JP19970303307	申请日期	1997.10.20
申请人		发明人
分类号	C30B15/00;C30B15/32;C30B29/06;H01L21/02;H01L21/208	主分类号	C30B15/00
代理机构		代理人
主权项
地址

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