X-ray generating method and x-ray generating apparatus

摘要

An energy beam (30) is irradiated onto a target (11a) from an energy beam source, thereby generating an X-ray (20) with an irradiating area to be irradiated onto an object. Then, the X-ray is introduced into a spectrometer (70,41), thereby generating an X-ray with parallelism (40) through the selection of wavelength and wavelength range.