发明名称 Bulk semiconductor substrates
摘要 Substrates of GaN 15 are grown on a foreign substrate 10 by HVPE. Compound semiconductor nanostrucures 11,12 deposited on the foreign substrate act as nucleation sites or seed crystals for the growth of the GaN substrate by epitaxial layer overgrowth. The GaN substrate may be removed from the underlying nanostructures without damage to the nanostructures allowing the growth of further GaN substrates.
申请公布号 GB2436398(A) 申请公布日期 2007.09.26
申请号 GB20060005838 申请日期 2006.03.23
申请人 UNIVERSITY OF BATH 发明人 WANG NANG WANG
分类号 H01L21/20;C30B25/18 主分类号 H01L21/20
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