发明名称 |
OPTICAL INTEGRATOR, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD |
摘要 |
<p>An optical integrator has characteristics to suppress influence of relative positioning error of a pair of optical members on an illuminance distribution and on a shape of an illumination field. The optical integrator is a wavefront splitting type optical integrator (8) comprised of a first optical member (8a) and a second optical member (8b) in an order mentioned from the entrance side of light. The first optical member has a plurality of first entrance surfaces (8aa) having a refractive power in a first direction (Z-direction) and substantially no refractive power in a second direction (X-direction), and a plurality of first exit surfaces (8ab) having a refractive power in the first direction and substantially no refractive power in the second direction. The second optical member has a plurality of second entrance surfaces (8ba) having a refractive power in the second direction and substantially no refractive power in the first direction, and a plurality of second exit surfaces (8bb) having a refractive power in the second direction and substantially no refractive power in the first direction.</p> |
申请公布号 |
EP1837895(A1) |
申请公布日期 |
2007.09.26 |
申请号 |
EP20050814721 |
申请日期 |
2005.12.09 |
申请人 |
NIKON CORPORATION |
发明人 |
KITA, NAONORI |
分类号 |
H01L21/027;G02B19/00;G03F7/20 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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