| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact integration azimuth sensor that can detect azimuth and posture, and can be mounted to portable equipment. <P>SOLUTION: The integration azimuth sensor is equipped with a three-axis magnetic sensor 4 for detecting earth magnetism, a two-axis acceleration sensor 3 for detecting gravity acceleration, and an arithmetic processing section 6 for processing magnetic information form the magnetic sensor 4 and acceleration information from the acceleration sensor 3. The magnetic sensor 4, acceleration sensor 3, and arithmetic processing section 6 are arranged on the same silicon substrate 7. The acceleration sensor 3 is composed of a comb-teeth-shaped fixed electrode that is fixed to the silicon substrate 7, a weight section having a comb-teeth-shaped movable electrode opposite to the fixed electrode, and a beam for supporting the weight section on the silicon substrate 7 so that the beam can be freely moved. <P>COPYRIGHT: (C)2003,JPO |
