发明名称 |
Bake plate having engageable thermal mass |
摘要 |
A bake station comprising a bake plate adapted to heat a substrate supported on an upper surface of the bake plate, the bake plate vertically moveable between an upper baking position and a lower cooling position; and a plurality of heat sinks adapted to be engageably coupled to a lower surface of the bake plate when the bake plate is in the lower cooling position.
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申请公布号 |
US7274005(B2) |
申请公布日期 |
2007.09.25 |
申请号 |
US20050174681 |
申请日期 |
2005.07.05 |
申请人 |
SOKUDO CO., LTD. |
发明人 |
QUACH DAVID H.;ISHIKAWA TETSUYA |
分类号 |
H05B3/68;C23C16/00;F28F7/00 |
主分类号 |
H05B3/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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