发明名称 Mixed composition interface layer and method of forming
摘要 An interface forming method includes forming a first layer containing a first chemical element and chemisorbing on the first layer an interface layer containing at least one monolayer of the first chemical element intermixed with a second chemical element different from the first chemical element. A second layer comprising the second chemical element can be formed on the interface layer. The first layer might not substantially contain the second chemical element, the second layer might not substantially contain the first chemical element, or both. An apparatus can include a first layer containing a first chemical element, an interface layer chemisorbed on the first layer, and a second layer containing a second element on the interface layer. The interface layer can contain at least one monolayer of the first chemical element intermixed with a second chemical element different from the first chemical element.
申请公布号 US7273660(B2) 申请公布日期 2007.09.25
申请号 US20020228404 申请日期 2002.08.26
申请人 MICRON TECHNOLOGY, INC. 发明人 BASCERI CEM;SANDHU GURTEJ S.
分类号 B32B9/00;C23C16/02;C23C16/18;C23C16/40;C23C16/44;C23C16/455;H01L21/02;H01L21/285;H01L21/316 主分类号 B32B9/00
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