发明名称 |
Phase shifting interferometric method, interferometer apparatus and method of manufacturing an optical element |
摘要 |
A phase shifting interferometric method and apparatus comprises generating at least four different phase shifts and recording interferograms corresponding to the different phase settings and recording interferograms corresponding to the different phase settings. In the analysis of the recorded interferograms the generated phase shifts between the at least four different phase settings are determined from the measurement, i.e. from the recorded interferograms. A model simulating the interferogram intensities may be used for determining the phase shifts. The phase shifts are free adaptable parameters of the model.
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申请公布号 |
US7274467(B2) |
申请公布日期 |
2007.09.25 |
申请号 |
US20050027989 |
申请日期 |
2005.01.04 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
DOERBAND BERND;SCHULTE STEFAN |
分类号 |
G01B11/02 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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