发明名称 Detector for detecting particle beams and method for the production thereof
摘要 The invention relates to a detector, and to a method for the production thereof, for detecting a high-energy and high-intensity particle beam ( 2 ), which comprises a crystalline semi-conductor plate ( 3 ) having a metal coating ( 4 ) and which is arranged on a substrate ( 5 ), the semi-conductor plate ( 3 ) being a diamond plate ( 6 ), which is coated on both faces with metal structures ( 7, 8 ). The metal structures ( 7, 8 ) comprise aluminium and/or an aluminium alloy and form electrodes, which are arranged to be connected to various electrical potentials by way of conductor tracks ( 10 ) on the substrate ( 5 ), the substrate ( 5 ) being a ceramic plate ( 11 ) having a central orifice ( 24 ), which is covered by the diamond plate ( 6 ).
申请公布号 US7274025(B2) 申请公布日期 2007.09.25
申请号 US20040502245 申请日期 2004.12.29
申请人 GESELLSCHAFT FUER SCHWERIONENFORSCHUNG MBH 发明人 BERDERMANN ELENI;DE BOER WIM
分类号 G01T1/24;H05H7/00;G01T;G01T1/00;G01T1/26;H01L29/15;H01L31/09;H01L31/115 主分类号 G01T1/24
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