发明名称 |
Method for manufacturing a magnetic recording medium |
摘要 |
A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern and has good recording and reproduction characteristics. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate so as to fill a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by dry etching so as to flatten the surfaces of the non-magnetic material and the recording layer. The flattening step includes a former flattening step and a latter flattening step for finishing.
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申请公布号 |
US7273563(B2) |
申请公布日期 |
2007.09.25 |
申请号 |
US20050048728 |
申请日期 |
2005.02.03 |
申请人 |
TDK CORPORATION |
发明人 |
HATTORI KAZUHIRO;OKAWA SHUICHI;SUWA TAKAHIRO;HIBI MIKIHARU |
分类号 |
G11B5/84;H01F1/00;G11B5/855;H01F41/32 |
主分类号 |
G11B5/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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