发明名称 Method for manufacturing a magnetic recording medium
摘要 A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern and has good recording and reproduction characteristics. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate so as to fill a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by dry etching so as to flatten the surfaces of the non-magnetic material and the recording layer. The flattening step includes a former flattening step and a latter flattening step for finishing.
申请公布号 US7273563(B2) 申请公布日期 2007.09.25
申请号 US20050048728 申请日期 2005.02.03
申请人 TDK CORPORATION 发明人 HATTORI KAZUHIRO;OKAWA SHUICHI;SUWA TAKAHIRO;HIBI MIKIHARU
分类号 G11B5/84;H01F1/00;G11B5/855;H01F41/32 主分类号 G11B5/84
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