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发明名称
深紫外线雷射光源之主动频谱控制技术
摘要
根据所揭示之主题之一实施例之观点,揭示一线窄化高平均功率高脉冲重覆雷射微影照相光源频宽控制方法及装置,其可包含一频宽度量模组,其测量光源所产生之雷射输出光脉冲束脉冲并提供频宽测量;一频宽错误讯号产生器,其接收该频宽测量及一频宽设定点并提供一频宽错误讯号;一主动频宽控制器,其提供一细频宽修正启动器讯号及一粗频宽修正启动器讯号以回应频宽错误。细频宽修正启动器和粗频宽修正启动器每一个可引入个别的光源行为修改,其减少频宽错误。粗和细频宽修正启动器每一个可包含多个频宽修正启动器。
申请公布号
TW200735493
申请公布日期
2007.09.16
申请号
TW095149174
申请日期
2006.12.27
申请人
希玛股份有限公司
发明人
杜恩斯坦;贾库斯;拉欧;崔秀克
分类号
H01S3/13(2006.01)
主分类号
H01S3/13(2006.01)
代理机构
代理人
恽轶群;陈文郎
主权项
地址
美国
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