ARBEITSKAMMER MIT EINER FERNBETÄTIGT ABDICHTBAREN DURCHFÜHRUNG FÜR EINE IN DIE ARBEITSKAMMER EINGREIFENDE ROBOTERHAND

摘要

A sealing device is provided for a working chamber system with a robot hand (216) that extends into the working chamber (100) through an aperture (120) by means of which a seal may be established and removed by remote control. The sealing device includes: (a) a flexible sealing element (20) by means of which an inner pass-through ring element (40) is connected with the edge of the aperture (120); (b) at least two coupling elements that are attached to the pass-through ring element (40) and (c) at least one locking element that is connected with the robot hand (216) and that may be positioned by means of positioning elements for coupling of the robot hand (216) with the pass-through ring element (40) by means of the coupling elements.