VERFAHREN ZUR VERBESSERUNG DES MIKROLOADING EFFEKTS BEIM SUBSTRATÄTZEN,申请号AT19980930516T-传众专利搜索

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发明名称	VERFAHREN ZUR VERBESSERUNG DES MIKROLOADING EFFEKTS BEIM SUBSTRATÄTZEN
摘要
申请公布号	AT371264(T)	申请公布日期	2007.09.15
申请号	AT19980930516T	申请日期	1998.06.24
申请人	LAM RESEARCH CORPORATION	发明人	ABRAHAM, SUSAN
分类号	H01L21/302;H01L21/3213;H01L21/66	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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