IMPLANTIERUNGSVERFAHREN UNTER VERWENDUNG SUBSTÖCHIOMETRISCHER SAUERSTOFFDOSEN BEI VERSCHIEDENEN ENERGIEN,申请号AT20010932852T-传众专利搜索

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发明名称	IMPLANTIERUNGSVERFAHREN UNTER VERWENDUNG SUBSTÖCHIOMETRISCHER SAUERSTOFFDOSEN BEI VERSCHIEDENEN ENERGIEN
摘要
申请公布号	AT371953(T)	申请公布日期	2007.09.15
申请号	AT20010932852T	申请日期	2001.05.02
申请人	IBIS TECHNOLOGY, INC.	发明人	DOLAN, ROBERT;CORDTS, BERNHARDT;ANC, MARIA;ALLES, MICHAEL
分类号	H01L21/265;H01L21/762;H01L21/02;H01L27/12	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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