| 摘要 |
A system and a method for aligning a wafer are provided to count the wafers supplied into a batch, to exactly and rapidly align the wafer, and to read the characteristic of each wafer. A base(11) is installed on a lower portion of a batch(10). A wafer alignment apparatus(12) is installed on the base to align a wafer. A transfer apparatus(13) supplies the wafer to the wafer alignment apparatus or transfers the aligned wafer. A driving apparatus(14) moves the base and alignment apparatus front and back. A lift apparatus(19) lifts each wafer mounted on the transfer apparatus upward. A count apparatus(22) count the number of the wafer mounted on the transfer apparatus. The driving apparatus includes a fixed bracket(15), a driving load(16), and an actuator(17). The fixed bracket is fixed at a side end of the base and has a bare wire therein. The driving load is screw-coupled to the fixed bracket. The actuator rotates the driving load reversibly.
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