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发明名称
ATOMIC LAYER DEPOSITION METHODS OF FORMING SILICON DIOXIDE COMPRISING LAYERS
摘要
申请公布号
KR100758758(B1)
申请公布日期
2007.09.14
申请号
KR20067005133
申请日期
2006.03.14
申请人
发明人
分类号
H01L21/205;C23C16/40;C23C16/44;C23C16/455;H01L21/20
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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