发明名称 |
ELECTRODE STRUCTURE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
An electrode structure and a method for manufacturing the same are provided to enhance accuracy and reproducibility by using a film as an intermediate medium without forming directly an electrode on a glass substrate. An adhesive layer(120) is formed on a substrate(110) by using an adhesive material. A seed layer(130) is formed on the adhesive layer by using a conductive material. A photoresist layer is formed on the seed layer. A mask having a pattern is formed on the photoresist layer. An exposure process and a developing process are performed. A conductive layer(140) is formed along the pattern on the developed substrate by using a plating method. The photoresist is removed. The adhesive layer and the remaining part except for a lower part of the conductive layer of the seed layer are removed. The conductive layer is fixed on the substrate by performing a baking process.
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申请公布号 |
KR20070092913(A) |
申请公布日期 |
2007.09.14 |
申请号 |
KR20060022891 |
申请日期 |
2006.03.11 |
申请人 |
SAMSUNG TECHWIN CO., LTD. |
发明人 |
KIM, YONG NAM;CHO, SE HOON |
分类号 |
H01J11/22;H01J11/34 |
主分类号 |
H01J11/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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