发明名称 ELECTRODE STRUCTURE AND METHOD OF MANUFACTURING THE SAME
摘要 An electrode structure and a method for manufacturing the same are provided to enhance accuracy and reproducibility by using a film as an intermediate medium without forming directly an electrode on a glass substrate. An adhesive layer(120) is formed on a substrate(110) by using an adhesive material. A seed layer(130) is formed on the adhesive layer by using a conductive material. A photoresist layer is formed on the seed layer. A mask having a pattern is formed on the photoresist layer. An exposure process and a developing process are performed. A conductive layer(140) is formed along the pattern on the developed substrate by using a plating method. The photoresist is removed. The adhesive layer and the remaining part except for a lower part of the conductive layer of the seed layer are removed. The conductive layer is fixed on the substrate by performing a baking process.
申请公布号 KR20070092913(A) 申请公布日期 2007.09.14
申请号 KR20060022891 申请日期 2006.03.11
申请人 SAMSUNG TECHWIN CO., LTD. 发明人 KIM, YONG NAM;CHO, SE HOON
分类号 H01J11/22;H01J11/34 主分类号 H01J11/22
代理机构 代理人
主权项
地址