| 摘要 |
PROBLEM TO BE SOLVED: To provide a deposition tool with which high dimensional accuracy can be secured by manufacturing the deposition tool for holding optical components which are deposition objects in a vapor deposition furnace or sputtering furnace by using a method other than cutting work. SOLUTION: The metal-made deposition tool 1 has a structure for holding the deposition objects 20 in the state of exposing deposition surfaces 20a and is mounted freely attachably and detachably to and from a specimen table provided within a vacuum furnace. The deposition fixture comprises a tool main body 2 having recesses 3 holding the deposition objects 20 and openings 4 disposed on the bottom part of the recess 3 to expose the deposition surfaces, and projections 5 to be locked which are projected to the side from the tool main body and are locked by the specimen table. The tool main body and the projections to be locked which are integral with the tool main body are constituted by laminating and integrating a plurality of metallic sheets 10 having holes 3a, 4a corresponding to the recesses and the openings, respectively. COPYRIGHT: (C)2007,JPO&INPIT
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