MULTI-WORKPIECE PROCESSING CHAMBER

摘要

A multi-workpiece chamber (100) includes at least two processing stations (120 and 122), for exposing workpieces to a treatment process. A partition (160) cooperates with the chamber such that the partition is disengagably removable from the chamber and re- engagable with the chamber for selectively dividing the processing stations. The partition is configured to provide for non-line-of-sight travel of certain ones of the process related products between the processing stations . An exhaust arrangement (140) divides exhaust flow into at least two approximately equal exhaust flow portions that leave the multi-workpiece chamber in a way which enhances uniformity of the treatment process for the stations. A partition configuration (160') is described including a partition portion (260) between the stations and a baffle portion (262) extending into an exhaust arrangement. A modified partition arrangement is provided fo use in establishing a modified exchange characteristic of the process related products.