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经营范围
发明名称
Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
摘要
申请公布号
DE602005001835(D1)
申请公布日期
2007.09.13
申请号
DE20056001835T
申请日期
2005.12.01
申请人
ASML NETHERLANDS B.V.
发明人
HENNUS, PIETER RENAAT MARIA;MERTENS, JEROEN JOHANNES SOPHIA MARIA;SMULDERS, PATRICK JOHANNES CORNELUS HENDRIK;SMITS, PETER
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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