| 摘要 |
<P>PROBLEM TO BE SOLVED: To stably and precisely control the rotating operation of a θ table. <P>SOLUTION: A stage device 10A comprises a surface plate 20; a stage 30 which moves over the plane of the surface plate 20; and the θ table 40 mounted onto the stage 30. Both a pivot shaft 80 for rotatably supporting the θ table 40 in a θz direction and a bearing 82 for rotatably pivoting the pivot shaft 80 are provided between an X-stage 38 and the θ table 40. A pair of θ linear motors 74 are provided for symmetrical locations in parallel with each other with respect to the pivot shaft 80 when viewed from above. Since the θ linear motors 74 are supported by supporting parts 79 in such a way that magnet yokes 76 may be at the same height as the side surfaces of the θ table 40 and the supporting parts 79 are raised from a floor surface laterally separated from the surface plate 20, a reaction force when the θ table 40 is rotated in a θz direction is transmitted to the floor surface via the supporting parts 79. <P>COPYRIGHT: (C)2007,JPO&INPIT |
