| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stop position control method for a carrier by which performance can be maintained over a long period of time with simple control. <P>SOLUTION: The carrier is decelerated at positions respectively apart from a prescribed deceleration start position. An optimal deceleration starting position is calculated from an observation value of positioning evaluation obtained by moving the deceleration starting position and an observation point of the positioning evaluation obtained by deceleration at the prescribed deceleration starting position. On the basis of the calculated value, a deceleration starting position is corrected. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
