| 摘要 |
A precision assembly ( 210 ) for positioning a device ( 226 ) includes a stage ( 260 ) that retains the device ( 226 ), a dual mover assembly ( 228 ) that moves the stage ( 260 ), and the device ( 226 ) along a movement axis ( 266 ), a measurement system ( 222 ) and a control system ( 224 ). The dual mover assembly ( 228 ) includes a first mover ( 262 ) that moves the stage ( 260 ) along the movement axis ( 266 ) and a second mover ( 264 ) that moves the device ( 226 ) along the movement axis ( 266 ). The second mover ( 264 ) is rigidly coupled to the first mover ( 262 ) so that movement of the first mover ( 262 ) results in movement of the second mover ( 264 ). Further, the total output of the dual mover assembly ( 228 ) along the movement axis ( 266 ) is equal to the sum of the movement of the first mover ( 262 ) and the movement of the second mover ( 264 ). The measurement system ( 222 ) measures a movement position along the movement axis ( 266 ). The control system ( 224 ) controls the dual mover assembly ( 228 ) utilizing the movement position. The control system ( 224 ) is designed to effectively decouple the control of the first mover ( 262 ) from the control of the second mover ( 264 ). Further, the control system ( 224 ) includes a quantization feedforward loop.
|
