摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oxygen sensor for performing detection by means of a simple circuit and moreover not causing the decrease of yield of a detection element. <P>SOLUTION: This oxygen sensor is equipped with: an oxygen-ion conductive solid electrolyte layer 105; a reference electrode layer 104 positioned on the substrate part 100 side of the electrolyte layer 105; a detection electrode layer 106 positioned on the opposite side of the electrolyte layer 105 with respect to the electrode layer 104; a heater part for raising the temperature of and activating the electrolyte layer; and a gas diffusion layer 103 formed between the electrode layer 104 and the substrate part for diffusing a reference gas in the layer. The diffusion layer 103 is formed with porosity causing a limiting current value to be 60 μA to 200 μA. The current value is obtained when a current flowing through the two electrodes becomes constant after placing an increasing voltage between the electrode layer 104 and the electrode layer 106. <P>COPYRIGHT: (C)2007,JPO&INPIT |