| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser machining system and a focussing control method, capable of achieving focussing with high precision. <P>SOLUTION: The laser machining system where the focus of laser light emitted to a machining object through an image forming lens is controlled to perform laser machining, is provided with: a mask 58 having a slit for focussing; an image pick-up means 54 where a machining mark machined by the laser light emitted to the machining object 19 through the slit and the image forming lens 14 is photographed; an image selection control means 55 where, based on image data on a plurality of the machining marks photographed by the image pick-up means and the image data on a machining mark as a preset standard, specified image data are selected; and a control means 57 where, based on the image data on the machining mark selected by the image selection control means, the distance between the machining object and the image forming lens is regulated so as to perform focussing. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
