| 摘要 |
PROBLEM TO BE SOLVED: To uniformly perform drying of a liquid drop applied on a body to be coated. SOLUTION: The liquid drop coating apparatus is provided with a liquid drop delivery head having a liquid chamber for storing the liquid and a plurality of nozzles communicated with the liquid chamber and a liquid drop delivering head delivering the liquid drop from the nozzles, a retaining body for retaining the body to be coated with the liquid drop delivered from the nozzles, and a drying part 4 for drying the body coated with the liquid drop. The drying part 4 has a chamber 33 for storing the body, a circulation means 35 for circulating a gas in an upper space of the body 7 stored in the chamber 33 between a central area and an edge part area, and a suction part 37 for sucking the gas in the chamber 33. COPYRIGHT: (C)2007,JPO&INPIT
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