摘要 |
PROBLEM TO BE SOLVED: To mount a crystal oscillation element in parallel with the surface of a substrate without bringing the crystal oscillation element into contact with the substrate or a lid body, and to output a stable frequency. SOLUTION: A piezoelectric device D comprises: a substrate 1 having a recess C inside; a piezoelectric vibration element 2 that is stored in the recess C and is packaged in a base part 1; and a lid body 3 for blocking the recess C in the substrate 1 for packaging the piezoelectric vibration element 2 for sealing airtightly. The piezoelectric vibration element 2 is packaged to one edge in the substrate 1 in the longitudinal direction in a cantilever state, and a magnetic body film 10 is provided at the other edge. COPYRIGHT: (C)2007,JPO&INPIT
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