| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotating device capable of detecting a rotational state of a rotated body in a vacuum processing tank without impairing the seal performance of the vacuum processing tank. SOLUTION: The rotating device mounted on a vacuum processing tank comprises: a rotated body to be rotated in the vacuum processing tank; an inner rotary shaft provided on the inner side of the vacuum processing tank to rotate the rotated body; an outer rotary shaft provided on the outer side of the vacuum processing tank and coupled with the inner rotary shaft via a magnetic joint; and a driving device capable of driving the outer rotary shaft. The device further comprises a rotation information transmitting means for transmitting rotation information of the rotated body to the outer side of the vacuum processing tank through a wall of the vacuum processing tank, and a rotation detection apparatus for detecting the rotational state of the rotated body based on the transmitted rotation information. COPYRIGHT: (C)2007,JPO&INPIT
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