System for adjusting manufacturing equipment, method for adjusting manufacturing equipment, and method for manufacturing semiconductor device

摘要

A system for adjusting a manufacturing equipment includes a measurement equipment configured to measure a plurality of sizes of portions of a product on a plane, an approximation module configured to approximate a planar distribution of the plurality of sizes by an orthogonal polynomial. as a function of coordinates on the plane, an association module configured to associate a plurality of terms in the orthogonal polynomial with a plurality of equipment parameters of the manufacturing equipment, respectively, the manufacturing equipment manufacturing the product, and an adjusting module configured to adjust the plurality of equipment parameters to reduce a plurality of distribution components, the plurality of distribution components composing the planar distribution approximated by the orthogonal polynomial.