发明名称 METHOD FOR CRYSTALLIZING A SEMICONDUCTOR THIN FILM
摘要 A method for crystallizing a semiconductor thin film is provided. The method includes continuously irradiating an energy beam on a semiconductor thin film while scanning at a given speed, wherein the semiconductor thin film is completely melted and the irradiation conditions of the energy beam are so set that the semiconductor thin film at a central position of the energy beam is finally crystallized in association with the scanning with the energy beam.
申请公布号 US2007212860(A1) 申请公布日期 2007.09.13
申请号 US20070684908 申请日期 2007.03.12
申请人 SONY CORPORATION 发明人 FUJINO TOSHIO;MACHIDA AKIO;KONO TADAHIRO
分类号 H01L21/20;H01L21/36 主分类号 H01L21/20
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