<p>A trap device (18) is described for removing species from a gas stream drawn from an enclosure by a vacuum pump. The trap comprises a casing (28) having an inlet (16) connectable to the enclosure for receiving the gas stream therefrom and an outlet (20) connectable to the vacuum pump for exhausting the gas stream from the casing. A plurality of cartridges are each removably insertable into the casing through a respective aperture (36) of the casing (28) and provide a respective flow passage between an inlet and an outlet thereof for gas passing through the casing, each cartridge housing means for removing species from the gas passing therethrough as solid material collecting within the cartridge.</p>
申请公布号
WO2006092550(A8)
申请公布日期
2007.09.13
申请号
WO2006GB00468
申请日期
2006.02.10
申请人
EDWARDS LIMITED;ENGERRAN, DAVID;DIXON, PHILIP;HOPE, MARK, CHRISTOPHER
发明人
ENGERRAN, DAVID;DIXON, PHILIP;HOPE, MARK, CHRISTOPHER