| 摘要 |
PROBLEM TO BE SOLVED: To provide a wide-band oscillator capable of stably providing a continuously wide frequency variable range, using a simple configuration. SOLUTION: The oscillator includes a glass substrate 21 including fixed electrodes 23a, 23b; a second glass substrate 28 including a coil pattern 30; a silicon substrate 26 disposed between the first and second glass substrates and including a diaphragm 26a; and a gas pipe 33 for making the diaphragm 26a movable. Thus, a function is presented such that when inductance L is increased, capacitance C is also increased and a resonance frequency becomes low; and at the same time, since feedback capacitance is increased, stable oscillation can be obtained over a large frequency variable range. COPYRIGHT: (C)2007,JPO&INPIT
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