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发明名称
POLIERVERFAHREN UND POLIERFLÜSSIGKEIT
摘要
申请公布号
DE60315257(D1)
申请公布日期
2007.09.13
申请号
DE20036015257
申请日期
2003.02.20
申请人
EBARA CORP.;KAO CORP.
发明人
WADA, YUTAKA;AKATSUKA, TOMOHIKO;SASAKI, TATSUYA;HAGIHARA, TOSHIYA
分类号
H01L21/304;B24B7/22;B24B37/04;B24B49/12;B24B53/007;B24B53/02;C09G1/00;C09K3/14;H01L21/3105
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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