| 摘要 |
<P>PROBLEM TO BE SOLVED: To stably and precisely control the rotating operation of a θ table. <P>SOLUTION: A stage device 10A comprises a surface plate 20; a stage 30 which moves over the plane of the surface plate 20; and the θ table 40 mounted onto the stage 30. The stage 30 comprises both a Y-stage 36 which moves in a Y-direction and an X-stage 38 which moves in an X-direction which intersects with the Y-direction at right angles. Both a pivot shaft 80 for rotatably supporting the θ table 40 in a θz direction and a bearing 82 for rotatably pivoting the pivot shaft 80 are provided between the X-stage 38 and the θ table 40. A pair of θ linear motors 74 are provided for symmetrical locations in parallel with each other with respect to the pivot shaft 80 when viewed from above. The pair of θ linear motors 74 generate a couple centering on the pivot shaft 80 by energizing a coil unit 78 to rotate the θ table 40 in the θz direction. <P>COPYRIGHT: (C)2007,JPO&INPIT |
