| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a detoxifying apparatus capable of preventing corrosion of a water-cooled chamber caused by hydrogen fluoride. <P>SOLUTION: Treated gas G containing PFC gas is combustion-cracked in a combustion cracking section 2. The inner surface of the water-cooled chamber 3 made of metal to jet water W to the combustion-cracked treated gas G from a water shower 36 for cooling is lined by an ETFE 43. Even if hydrogen fluoride is produced by the reaction of fluorine produced by combustion-cracking the PFC gas, and the water W jetted from the water shower 36, the corrosion of the inner surface of the water-cooled chamber 3 caused by hydrogen fluoride can be prevented. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
