发明名称 Gallium Nitride Single Crystal Growing Method and Gallium Nitride Single Crystal
摘要 It is provided a method of growing gallium nitride single crystal of good quality with a high productivity, in the growth of gallium nitride single crystal by Na-flux method. Gallium nitride single crystal is grown using flux 8 containing at least sodium metal. Gallium nitride single crystal is grown in atmosphere composed of gases mixture "B" containing nitrogen gas at a pressure of 300 atms or higher and 2000 atms or lower. Preferably, the nitrogen partial pressure in the atmosphere is 100 atms or higher and 2000 atms or lower. Preferably, the growth temperature is 1000° C. or higher and 1500° C. or lower.
申请公布号 US2007209575(A1) 申请公布日期 2007.09.13
申请号 US20050594846 申请日期 2005.03.30
申请人 NGK INSULATORS, LTD. 发明人 IWAI MAKOTO;IMAI KATSUHIRO;IMAEDA MINORU
分类号 C30B9/00;C30B9/10;C30B17/00;C30B29/38 主分类号 C30B9/00
代理机构 代理人
主权项
地址