发明名称 |
SUBSTRATE TREATING DEVICE SYSTEM |
摘要 |
<p>Provided is a substrate treating system capable of facilitating setting of an operation right in a plurality of substrate treating devices and a managing device. The substrate treating system (300) includes a plurality of substrate treating devices (100) for treating a wafer (200) and a managing device (302) connected to the substrate treating devices (100) via a communication line (308). The managing device (302) includes a display screen (350) for setting an operation right to operate the managing device (302) and each of the substrate treating devices (100) which can communicate with the managing device (302) for each of the users.</p> |
申请公布号 |
WO2007102582(A1) |
申请公布日期 |
2007.09.13 |
申请号 |
WO2007JP54544 |
申请日期 |
2007.03.08 |
申请人 |
HITACHI KOKUSAI ELECTRIC INC.;IWAKURA, HIROYUKI |
发明人 |
IWAKURA, HIROYUKI |
分类号 |
H01L21/02;G05B19/418;H01L21/205 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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