发明名称 SUBSTRATE TREATING DEVICE SYSTEM
摘要 <p>Provided is a substrate treating system capable of facilitating setting of an operation right in a plurality of substrate treating devices and a managing device. The substrate treating system (300) includes a plurality of substrate treating devices (100) for treating a wafer (200) and a managing device (302) connected to the substrate treating devices (100) via a communication line (308). The managing device (302) includes a display screen (350) for setting an operation right to operate the managing device (302) and each of the substrate treating devices (100) which can communicate with the managing device (302) for each of the users.</p>
申请公布号 WO2007102582(A1) 申请公布日期 2007.09.13
申请号 WO2007JP54544 申请日期 2007.03.08
申请人 HITACHI KOKUSAI ELECTRIC INC.;IWAKURA, HIROYUKI 发明人 IWAKURA, HIROYUKI
分类号 H01L21/02;G05B19/418;H01L21/205 主分类号 H01L21/02
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